Device for coulometric determination of the thickness of metal layers

摘要

The invention relates to a device for coulometric determination of the thickness of metal layers on non-conductive or high-resistance substrates, by means of which it is possible to determine thicknesses of metal layers on, e.g., insulating material or semiconductor materials. It is the object of the invention to develop a device for coulometric determination of the thickness of metal layers on non-conductive or high-resistance substrates which consists of a power supply device, a measured value output and an electrolytic cell. The electrolytic cell consists of an annular basic cell body known per se and filled with electrolyte, a known cathode, a known measurement surface and a current-restricting insert made from non-conductive material with a lower limiting surface, the current-restricting insert containing a central bore which narrows the current path between the cathode and test surface.