发明名称 UNIVERSAL FLAT ORIENTER FOR SEMICONDUCTOR WAFERS
摘要 <p>Wafers (36) are rotated by a grooved driver (16) engaging the wafer circular (36a) to position flats (36b) on the wafers (36) in the same orientation. The driver (16) is then automatically moved closer to the wafers (36) to engage the flat edges (36b) and then rotate the wafers (36) a selected amount to obtain the desired orientation. </p>
申请公布号 WO1984004739(A1) 申请公布日期 1984.12.06
申请号 US1984000789 申请日期 1984.05.22
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