| 摘要 |
<p>An automated system lifts a batch of semiconductor wafers from a slotted carrier (16), transfers them laterally and lowers them into a second slotted carrier (29). In doing this, jaws (78, 79) on the lifting apparatus (30) open automatically to receive or release the wafers. With a carrier having relatively high slotted sides, such as the commonly used plastic cassette, a pusher (32) engages the lower edge of the wafers exposed through the bottom of the cassette and pushes them upwardly sufficiently far to permit the lifter jaws (78, 79) to receive and lift the wafers. The apparatus is oriented at a slight angle to insure that the wafers are all arranged in precise, spaced, parallel relation so as to cooperate with slots (120) in the lifter jaws (78, 79) and slots in the receiving carrier. The system has the capability to move two batches of 25 wafers to a quartz boat having 50 more-closely spaced slots, and similarly, two batches from a quartz boat may be transferred to two different plastic cassettes. </p> |
