摘要 |
Method of producing an electrostatic recording head, and a recording head produced by said method and having a high-precision and high-resolution array of writing tips of the required cross section and an interconnection pattern for easy electrical connection of the writing tips to driver circuits. A planar thin-film pattern of spaced metallic electrode conductors (92) is produced on one surface of a glass or ceramic substrate (90) using photolithographic and electroplating processes. An array of planar thin-film bus conductors (114a, 114b...) is produced on the opposite surface in a similar way. The electrode conductors and the bus conductors are formed by vacuum deposition of a metal on the substrate surfaces, etching of the desired pattern and galvanoplastic production of the desired thickness and cross-sectional shape. Electronic components in film form may be provided on the same substrate on which the electrode conductors are located. <IMAGE>
|