| 摘要 |
PURPOSE:To take a measurement accurately and speedily by measuring the difference between the gap amount between two oppositely coupled bodies which use a transparent body as one of them and a thickness on a master gauge by utilizing light interference. CONSTITUTION:Laser light 13a generated by a laser device 13 is made incident to a transparent member 18 and reflected light from surfaces 14a and 14b is enlarged through a convex lens 20 and projected upon a screen 21a. The head 16a of an expanding/contracting device 16 is fed to allow the master gauge 19 to contact with a member 17 and the transparent member 18. Then, pressure is detected by a load sensor 29 to output a counting start command to a signal processing part 22, and then the head of the expanding/contracting device 16 is moved back to a rear end. Interference fringes move on the screen 21a simultaneously, so the number of dark parts of the interference frings moving onto a photodetecting element 21 until the member 17 returns to its original position is counted by a counter 25 and inputted to a computing element 26. |
