| 摘要 |
PURPOSE:To measure a shape of large and small measured wave front by making a measuring light pass through a zoom lens optical system, separating it into two luminous fluxes whose proceeding optical paths have been inclined each other by a minute angle in a prescribed surface. CONSTITUTION:A measuring light having a wave front W to be measured is made incident on a beam splitter 10 through a converter lens 18, separated into two luminous fluxes, reflected by plane mirrors 12, 14, and becomes two luminous fluxes which have been inclined each other by a minute angle. These two luminous fluxes are converted to a size conforming with a size of a photodetecting surface of an area sensor of a wave front camera 16A such as a CCD camera, etc. and arrive. Based on a data which has been read by the area sensor, operations such as a Fourier transformation of an interference fringe, an elimination of an inclination component, a reverse Fourier transformation, an integration of a horizontal shift direction, etc. are executed, and a wave front shape is measured. Next, a measurement is executed by rotating the whole sensor part by 90 deg. around the optical axis, and a three-dimensional shape of the measured wave front W is specified. |
