发明名称 COAXIAL CYLINDRICAL TYPE ENERGY ANALYZER
摘要 PURPOSE:To secure such an analyzer as being yet higher in capacity than ever before, starting from a CMA type, by installing an electrode in use for changing an electric field between both inner and outer cylinders as well as for realizing a secondary convergingness of charged particles in addition to these inner and outer cylinders. CONSTITUTION:An inner cylinder 2 and an outer cylinder 3 are set up coaxially, giving voltage to space between these inner and outer cylinders 2 and 3, while charged particles discharged out of one point S on a shaft are made incident into an electric field space lying between these cylinders from an aperture 5 installed in the inner cylinder 2, and these particles are energetically separated because of difference in a kinetic track due to an energy differential. In a sucklike energy analyzer, an electrode, which is used for changing an electric field between these inner and outer cylinders as well as for realizing a secondary convergingness of charged particles, is installed in addition to these cylinders 2 and 3. The said electrode, for example, is set down to a partition wall 8 provided with an aperture 9 where a wire net to pass these particles is stretched, and this wall 8 is set up vertically to these inner and outer cylinders 2 and 3, through which these cylinders 2 and 3 are made to be coaxial and subjected at both sides of an electrode 8, and inners 2 and 12 themselves and outer cylinders 3 and 13 themselves are all electrically connected together whereby the specified voltage is made so as to be giveable to the outer cylinder 3 and the electrode 8 in relation to the inner cylinder 2.
申请公布号 JPS59215651(A) 申请公布日期 1984.12.05
申请号 JP19830090882 申请日期 1983.05.24
申请人 YAMAMOTO SHINICHIROU 发明人 YAMAMOTO SHINICHIROU
分类号 H01J49/44;H01J49/48;(IPC1-7):H01J49/44 主分类号 H01J49/44
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