DEVICE FOR FORMING THIN FILM

摘要

PURPOSE:To enable continuous formation of a thin film having high orientation and crystallinity by installing a mask having a shielding plate between a cylindrical scan and evaporating source. CONSTITUTION:A high polymer film 12 wound on a cylindrical scan 11 passes over a sputtering gun 13 at a constant speed. When the metal scattering from the gun 13 passes through a mask 14, the metal scattering diagonally is removed by a shielding plate 15 provided to the mask 14. The metal sticking on the film 12 is therefore made incident roughly perpendicularly to the plane of the film 12. The metal deposited on the film 12 is consequently only the metal made incident perpendicularly thereto and the thin film having good crystallinity and orientation is formed continuously at a high speed.