发明名称 PROJECTION EXPOSURE APPARATUS
摘要 PURPOSE:To facilitate attaching and detaching of a lens to form a U-shape cavity which has an opening in a column to which the lens is attached. CONSTITUTION:A lens 51 is attached to a mirror cylinder 56 by a lens flange 520. The mirror cylinder 56 is inserted into a mirror cylinder holder 57 and fixed to the holder 57 by ring nuts 550. The lens attaching part composed like this is fixed to a column 8 by a holder receptacle ring 58. A U-shape cavity 83 which has an opening is formed in the column 8. The lens attaching part can be attached and detached to the direction of an arrow from the opening side of this cavity.
申请公布号 JPS59214225(A) 申请公布日期 1984.12.04
申请号 JP19830087704 申请日期 1983.05.20
申请人 HITACHI SEISAKUSHO KK 发明人 IWASAKI HIROSHI
分类号 G03F7/20;H01L21/027;H01L21/30;(IPC1-7):H01L21/30 主分类号 G03F7/20
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