Method for coating by glow discharge

摘要

A gaseous compound of a metal species or a semi-metal species is reacted with another gaseous substance capable of reacting with the gaseous compound of the metal or semi-metal species under a total pressure of not more than 10 Torr, where the partial pressure of the gaseous compound is not more than that of the gaseous substance, the reacting being carried out by the glow discharge generated between an electroconductive workpiece connected to a cathode, at least one secondary cathode provided at a position near enough to the workpiece to generate interactions of glow discharge between at least selected portions of the workpiece and the at least one secondary cathode, and an anode, thereby coating the at least selected portions of the workpiece with the resulting reaction product containing the metal or semi-metal species.