发明名称 DIE BONDING APPARATUS
摘要 PURPOSE:To avoid the building up of jointing solder by varying arbitrarily a pressing load of a semiconductor chip against a subplate. CONSTITUTION:A semiconductor chip 1 is mounted on a prescribed position of a submount 2 and jointed by melting solder on the submount 2 by heating from beneath the submount 2. The pressing of the chip 1 against the submount 2 is straight pressur type and the load is applied by a pressing rod 17 and a weight 18 put on the rod 17. By blowing the compressed air through side holes 24 of a loading head 19, the chip pressing load can be reduced.
申请公布号 JPS59214230(A) 申请公布日期 1984.12.04
申请号 JP19830087433 申请日期 1983.05.20
申请人 HITACHI SEISAKUSHO KK 发明人 TAJIMA TAKESHI;CHIBA KATSUAKI;KANETOMO MASABUMI;IMAI KUNINORI
分类号 H01L21/52;H01L21/58;H01S5/00;(IPC1-7):H01L21/58;H01S3/18 主分类号 H01L21/52
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