| 摘要 |
PURPOSE:To control laser light at high speed by amplifying an error between a control signal and an output from a glow discharge current detector, controlling a DC high voltage power supply, amplifying an error between the amplified output and an output from a silent discharge current detector and controlling an AC high voltage power supply. CONSTITUTION:A power supply device for a silent discharge spare excitation gas laser consists of a DC high voltage power supply 6, a glow discharge current detector 13, an AC high voltage power supply 8, a silent discharge current detector 17 and amplifiers 16, 18. An error between a control signal 14 and the glow discharge current detector 13 is amplified by the amplifier 16, and the DC high voltage power supply 6 is controlled. An error between an output from the amplifier 16 and an output from the silent discharge current detector 17 is amplified by the amplifier 18, and the AC high voltage power supply 8 is controlled. The speed of response of glow discharge currents is increased extremely, and an output from laser light can be controlled at high speed. |
