| 摘要 |
PURPOSE:To prevent the excessive flowing of sealing glass at the peripheral part of a diaphragm, by forming a stopper, which stops the flow of the sealing glass comprising high melting point glass, between a glass sealing part and thin film electrodes. CONSTITUTION:Thin film electrodes 9 for a thick base plate 7 and a diaphragm 8 are formed. Then glass for a stopper 12 is printed on the thick base plate 7 and dried. Burning is performed at a temperature, at which a specified melting point of the stopper 12 is reached. Thereafter, a glass sealing part 10 is formed by low-melting point glass. The shorter the inner diameter of the formed stopper 12, the less the amount of displacement of the diaphragm 8 due to the external pressure. The fluctuation range of the value of the electrostatic capacity of the detecting part of an electrostatic capacity type pressure sensor is also reduced. With respect to the inner diameter of the stopper 12, it is necessary to consider the relationship with the fluctuation range of the value of the electrostatic capacity, and the inner diameter of the glass sealing part 10 since the stopper 12 is located at the inside of the glass sealing part 10. With respect to the thickness of the stopper 12, 0.5-1.0mm. is optimum in order to sufficiently stop the flow of the low melting point glass. |
