发明名称 |
Method and apparatus for rapidly regenerating a self-contained cryopump |
摘要 |
To reduce the time for regenerating self-contained cryopumps a direct connection is provided during the defrosting operation between the associated expansion space and the high-pressure gas source of the cryogenerator, to heat up the low-temperature condensation surface, while the cryogenerator continues to operate. The application is particularly to multi-stage self-contained cryopumps.
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申请公布号 |
US4485631(A) |
申请公布日期 |
1984.12.04 |
申请号 |
US19830531690 |
申请日期 |
1983.09.13 |
申请人 |
BALZERS AKTIENGESELLSCHAFT |
发明人 |
WINKLER, OTTO |
分类号 |
F04B37/08;(IPC1-7):B01D8/00 |
主分类号 |
F04B37/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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