| 摘要 |
PURPOSE:To increase the sensitivity of a sensitive body by successively laminat ing a blocking layer of microcrystalline silicon and a photoconductive layer of microcrystalline silicon on a support and by incorporating carbon or the like into both the layers ununiformly in the thickness direction. CONSTITUTION:A blocking layer 2, a photoconductive layer 3 and a surface layer 4 are successively laminated on an electrically conductive support 1. The blocking layer 2 is made of microcrystalline silicon contg. a group III or V element and C, O or N, and the concns. of the group III or V element and C, O or N are made higher in the lower layer 2a on the support 1 side. The photoconductive layer 3 is made of microcrystalline silicon contg. a group III or V element and C, O or N, the C, O or N is ununiformly distributed in the thickness direction, and the concn. is made higher in the upper layer 3a close to the surface layer 4. Since microcrystalline silicon is used and the group III or V element and C, O or N are properly incorporated into the layers, the resulting sensitive body can be provided with superior electrostatic charging performance, sensitivity and wear resistance. |
