| 摘要 |
PURPOSE:To alleviate the induction current and enhance the cooling efficiency by a method wherein a compressor, a condenser, and an expansion valve are connected in ring form to the outer cylinder, and a colant is circulated through the gap between the outer cylinder and a discharge tube. CONSTITUTION:The gaseous coolant 24 coming out of a coolant outlet 23 is guided to the compressor 25 in a saturated vapor state of low temperature and low pressure. This gaseous coolant 24 is compressed to a heating vapor area of high temperature and high pressure by means of the compressor 25, isostatically cooled by means of the condenser 26, thus being vaporized. Successively, it expands by means of the expansion valve 27 in isonethalpy, turning to low temperature and low pressure, and is then guided from the coolant inlet 22 into a double tube formed by the discharge tube 1 and the outer cylinder 15. The coolant 24 in a liquid state vaporizes and deprives the discharge tube 1 of heat of vaporization. The induction current can be alleviated by cooling said tube by latent heat in such a manner, and uniform cooling can be performed because of high cooling efficiency; therefore a laser output of high stability can be obtained. |
