CAPACITY COUPLING TYPE GLOW DISCHARGE DECOMPOSITION APPARATUS

摘要

PURPOSE:To form a photosensitive layer having uniform film thickness and uniform film quality by constructing an electrode plate for glow discharge to have a double layered structure with an internal electrode plate having a gas ejecting part and an external electrode plate forming a reaction chamber and making the both electrode plates continuous. CONSTITUTION:A conductive cylindrical body 22 and an electrode plate 24 for glow discharge are made to confront in a reaction chamber 21 which can be evacuated, and a gas for producing an amorphous layer is blown to the peripheral surface of the cylindrical body 22 to produce an amorphous layer on the peripheral surface of the cylindrical body 22. An electrode plate 24 is constructed in this capacity coupling type glow discharge decomposition apparatus to a double layered structure consisting of an internal electrode plate 26 having a gas ejecting part 25 and an external electrode plate 28 forming a reaction chamber 21 and having a gas introducing part 27. Both electrode plates 26, 28 are made continuous. As the result, the gas for producing a photosensitive layer distributes uniformly around the drum, so effective discharge is caused around the drum with high efficiency. Accordingly, a photosensitive layer having a uniform film thickness and uniform film quality is produced.