| 摘要 |
PURPOSE:To obtain the device with which a glass substrate can be safely conveyed without microscopic dust adhered to a circuit pattern part by a method wherein the glass substrate is placed on a U-shaped shifting frame, the side face position of the corner part of said glass substrate is positioned using a controlling means and the side face position is constituted in such a manner that it is provided on a reticle mounting stand. CONSTITUTION:When the glass substrate 4 is going to be conveyed, the corner parts of the square-shaped substrate 4 are placed on the supporting piece 21 of a moving frame 13 and the plate of the corner part opposing to said supporting piece 21, and the corners of right-side-hanging-down diagonal line are pinched by the four small poles 23a- 23d. When the glass substrate 4 is carried to the point above reticle mounting stand 3, an air cylinder 17 is operated, the shifting frame 13 comes down, and said glass substrate is mounted on the reticle mounting stand. At this time, as all supporting pieces 21 are leaped up, the shifting frame 13 can to retreated in V-direction when a motor 15a is rotated inversely. As the conveying device is constituted as above, no microscopic dust is generated by the friction of side face of the glass substrate 4, and also a highly precise positioning can be accomplished by performing a computer control on the movement of each driving part. |
