| 摘要 |
PURPOSE:To alleviate the induction current and thus stabilize the output characteristic by a method wherein a coolant of a low specific dielectric constant is sealed between a discharge tube and the outer cylinder, and then the discharge tube is cooled by utilizing the latent heat based on the phase variation of this coolant. CONSTITUTION:As an insulation liquid 18a constituting the coolant and circulated through the discharge tube 1, a coolant such as ammonia or hydrogen fluoride, halide and carbide which has a low specific dielectric contant and causes phase variation at a laser operating temperature is used. The induction current flowing through said liquid 18a, the coolant for cooling, is proportional to the static capacitance of this liquid 18a, and this static capacitance to the specific dielectric constant. Said constant of hydrogen fluoride, halide and carbide used as the coolant is about 2-6; thereby the induction current decreases remarkably. Besides, because of utilization of the latent heat accompanying the phase variation, the property of thermal response is excellent, and accordingly the temperature of the discharge tube 1 can be kept constant with extremely good accuracy. |
