| 摘要 |
PURPOSE:To improve an S/N ratio or resolution by arranging a potential barrier and a potential well under each transfer electrode of a VCCD, and transferring charges of respective potential wells through empty potential wells from the output terminal of the VCCD vertically in the opposite direction. CONSTITUTION:The channel 10 of the VCCD stores signal charges in potential well parts 10 (A, B, and C) having a deeper potential and separates respective potential wells by potential barrier parts 11 (A, B, and C) having a shallower potential. An N type bulk channel is preferable as the channel 10 of each VCCD and separated by a P<+> channel stop area 16. The signal charge stored in each potential well is transferred vertically through empty potential wells independently from the output terminal of the VCCD, and consequently the resolution and sensitivity of the CCD sensor which uses the VCCD are improved greatly. |
