| 摘要 |
PURPOSE:To prevent impurities from mixing into thin films and extend the life of a target and reduce the defective products by a method wherein thin layers of the same ferromagnetic material as the target are formed at the bottoms of the gaps provided to the target. CONSTITUTION:A ferromagnetic target 2, which has gaps 3 of less than 3mm. width, is provided to the surface of a backing plate 1. A magnetic field of a magnetic field generator 4, provided to the back of the backing plate 1, is leaked on the surface of the target 2 through the gaps 3 in order to improve the plasma density to sputter ferromagnetic material. Thin layers 5 of the same ferromagnetic material as the target 2 are formed at the bottoms of the gaps 3. With these layers 5, the backing plate 1 is not sputtered by ions rushing into the gap 3 and mixing of the backing plate materials such as Cu into the thin films as impurities is avoided so that the target 2 can be used until the surface of the backing plate 1 is exposed by errosion. Therefore the life of the target 2 can be extended. |
