| 摘要 |
PURPOSE:To enable the distinguishing of actual defects from false ones by generating inspection signals from the surface to be inspected under blowing condition to compare the inspection signals in the same scan line, provided that they are the same in the scanning direction but different in the scanning timing. CONSTITUTION:A scanning means scans a surface to be inspected of a sample reciprocally by a scan light and a blowing means blows air against the surface being inspected to remove floating dust or the like attached thereto during the inspection. In addition,an inspection signal generating means 4 generates an inspection signal for voltage corresponding to the intensities of reflected lights and transmission lights from the surface being inspected. Decision means 13-16 decides that a defect exists on the surface being inspected when two inspection signals in the same scan line from the surface being inspected coincide by comparison, provided that they are the same in the scanning direction but different in the scanning timing. Thus, actual defects and can be distinguished from false defects due to floating dusts attached to the surface during the inspection. |
