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发明名称
UNIFORM CHEMICAL ETCHING METHOD
摘要
申请公布号
EP1883954(A1)
申请公布日期
2008.02.06
申请号
EP20060808235
申请日期
2006.05.18
申请人
S.O.I.TEC. SILICON ON INSULATOR TECHNOLOGIES S.A.
发明人
DELATTRE, CECILE
分类号
H01L21/306;H01L21/00
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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