HEAT RESISTANT AND RADIATION SENSITIVE COMPOSITION AND RESIST

摘要

PURPOSE:To provide heat resistance and superior sensitivity to radiation to a radiation sensitive composition by using specified chlorinated poly-2-isopropenylnaphthalene. CONSTITUTION:This radiation ensitive composition contains chlorinated poly- 2-isopropenylnaphthalene prepd. by introducing chlorine into naphthalene rings in poly-2-isopropenylnaphthalene having >=40 deg. of polymn. at 0.2-5mol average degree of substitution of chlorine per 1mol constituent monomer.