| 摘要 |
<p>PURPOSE:To obtain an inexpensive finger touch type input device which can display the position even when a subject has a large area, by forming an X-Y matrix electrode consisting of a transparent conduction film on a transparent film. CONSTITUTION:A pattern of an X electrode 5 having 100-200mum width is formed on a polyethylene telephthalate substrate 4 with use of a thin film forming process using high frequency sputtering, etc. and a photoetching process. Then an intersecting point 7 between the X electrode 5 and a Y electrode 6 is insulated with an insulating material such as SiO2, polyimide, etc. While a distortion sensor film is formed in a pattern at the distortion sensor forming position with an amorphous Si film 9 obtained by giving glow discharge to SiH4 or SiF4. Then the electrode 6 is formed into a pattern. Thus a finger touch type input device is obtained.</p> |
