SUPPORTING DEVICE OF PANEL AND MANUFACTURING MATHOD OF THIN FIRM TRANSISTOR ARRAY PANEL

摘要

An apparatus for supporting a substrate and a thin film transistor display panel are provided to prevent the damage of a substrate and to reduce a haze and a short by completely covering an edge of the substrate. A susceptor(40) supports a substrate. A supporting unit(120) is formed on an edge of the susceptor. A shadow frame(112) is overlapped with the supporting unit. The supporting unit is installed on a reactive chamber(10) having an internal space. A gas injection tube(80a) injects gas into the reactive chamber. A diffuser(70) diffuses the gas injected into the reactive chamber. The supporting unit includes a first part and a second part having a thickness thinner than that of the first part to have an L shape. When the substrate is received on the susceptor, an edge of the substrate is placed over the second part of the supporting unit. The supporting unit is coupled to the susceptor with a screw.