| 摘要 |
PURPOSE:To minimize the radiation loss of formed plasma, by arranging a shield member between a titanium vapor generating part and the inner wall of a vacuum container. CONSTITUTION:A shield member 4 is arranged between the leading end 3a of a titanium evaporation apparatus 3 and a space for generating plasma P. The titanium vapor generated from the leading end 3a of the titanium evaporation apparatus 3 is adhered to the surface of the shield member 4 in the side of the titanium evaporation apparatus 3 and a part of the inner wall surface of a vacuum container 1 not contacted with plasma P and the vacuum container 1 is evacuated to a high vacuum degree by the adsorbing action of the adhered titanium. At this time, because titanium adhered to the shield member 4 and a part of the inner wall of the container 1 is not contacted with plasma P, no mutual action is generated and the mixing of titanium in plasma P is minimized to minimize the radiation loss of the formed plasma P. |
