| 摘要 |
PURPOSE:To improve drawing accuracy by dividing the desired drawing figure into a peripheral figure and internal figure and then giving different irradiation beams to them respectively. CONSTITUTION:The desired drawing figure L is divided into the peripheral figures N1-Nn and internal figures M1-Mn. Then, the irradiation time for drawing internal figures is set shorter than that for drawing the peripheral figures. Thereby, amount of irradiation for drawing internal figures is set smaller than that for drawing peripheral figures. As a result, lowering of size accuracy of figures resulting from electron scattering to the inside of resist and temperature rise can be prevented. Thereby the drawing accuracy can be improved. |
