NOVEL OXAMIDE ACID DERIVATIVE, MANUFACTURE AND MEDICINE

摘要

PURPOSE:To improve vapor deposition efficiency and the magnetic characteristic, by causing the vapor current of the ferromagnetic material and gas from the ion source to go toward the substrate in the vacuum atmosphere to form a ferromagnetic metal thin film layer on the substrate. CONSTITUTION:Ferromagnetic material 10 is heated and evaporated from ferromagnetic material evaporation source 9 in the lower part of vacuum tank 1, and gas is ionized and led in from ion source 11 provided on the left inside wall of vacuum tank 1 and is converged by ring electrode 12 and is caused to go toward substrate 4 which moves along cylindrical can 3. Gas ionized by ion source 11 has high energy of several hundred electron volt and is converged and is caused to go toward substrate 4, so that the incident direction of vapor current of the ferromagnetic material having vapor deposition energy of approximately 0.1 electron volt is controlled easily and sufficiently to make efficient vacuum vapor deposition possible. Consequently, a good magnetic characteristic is obtained.