| 摘要 |
PURPOSE:To enable to obtain a larger bonding strength and more favorable ohmic and resistance value characteristics by a method wherein an upper metal electrode or a lower metal electrode can be formed of an alloy of Ti and Ag. CONSTITUTION:A lower metal electrode 2, an amorphous Si layer 3 and a transparent electrode 4 have been formed by superposing on an insulating substrate 1 and an upper metal electrode 5 has been provided on the electrode 4. In this condition, the electrode 2 is formed into an alloy film of Ti and Ag and the film is provided on the substrate 1. In case an alloy of Ti and Ag is used as a metal electrode, the characteristics of a solar cell are significantly improved. Moreover, the adhesive power with an amorphous SiP layer becomes stronger and a significant upgrade of the yield can be effected. This is due to that the bonding strength of Ti with the substrate 1 and the layer 3 is large and a metal electrode, which has the favorable ohmic and resistance value characteristics of Ag together, has been formed. |
