发明名称 ULTRASONIC MACHINING DEVICE
摘要 PURPOSE:To clamp and fix a wire connecting tool positively to a bonding arm by forming a plane section to the outer surface of the wire connecting tool mounted to the bonding arm and pushing a clamping tool set up to the wire connecting tool and bringing it into contact to the plane section. CONSTITUTION:A bonding arm 7 with a horn is connected to an arm 1 so that a vibration can be transmitted from a vibrator 5, and supported in approximately horizontal direction. A capillary 10 as a wire connecting tool is inserted into a mounting hole 8 for the arm 7. The capillary 10 is formed to an approximately columnar shape, to the center thereof an inserting hole 11 is formed, and a plane section 12 is notched to the outer surface of the circumference of the capillary. Since a screw member 13 pushes and is in contact with the plane section 12 at an approximately right angle and gives the capillary 10 clamping force, the capillary 10 is clamped stably by the screw member 13 in the arm mounting hole 8, and fixed positively to the arm 7.
申请公布号 JPS59208846(A) 申请公布日期 1984.11.27
申请号 JP19830082645 申请日期 1983.05.13
申请人 HITACHI SEISAKUSHO KK 发明人 OKAMOTO MICHIO
分类号 H01L21/60;H01L21/607 主分类号 H01L21/60
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