| 摘要 |
<p>PURPOSE:To enhance the stability of the titled recording head during high speed recording and to enhance the life thereof, by providing a heat generating membrane resistor comprising a CrSi2 intermetallic compound and a current passing conductor onto a substrate while performing recording to predetermined paper in such a state that a current is supplied to the aforementioned resistor to heat the same. CONSTITUTION:A Cr-film 4 is formed to an Si-substrate 5 by sputtering or vapor deposition and heated at 300-750 deg.C in vacuum to obtain a CrSi2 target. After evacuation is performed to reduce pressure to 3X10<-7> Torr, Ar gas is introduced to adjust a vacuum degree to 65mum Hg and sputtering is performed according to a dipole DC sputtering system under such a condition that the distance between electrodes is 60mm., the partial pressure of Ar is 4-6X10<-2> Torr and electric power is 100W. The obtained target is used as a heat generating resistor 1 to form a heat sensitive recording head according to a usual photoprocess to perform a step stress test. As a result, a long life recording head having excellent characteristics is obtained.</p> |
