发明名称 PELLET BONDING APPARATUS
摘要 PURPOSE:To prevent adhesion of gas generated during the baking to the surface of pellet by spraying the purified gas after the baking and executing forced exhaustion of ambient gas. CONSTITUTION:An exhaust tank 22 is provided corresponding to a spray header 21 just below a heat block 19. A spray header 25 is provided just above the heat block 23 and a plurality of blowing ports are also opened to the lower surface wall of this header 23. The exhaust tank 26 is facing to the header 25 just below the block 23, a spray header 27 used as the post spraying means is provided adjacently at the right side of the header 25 and a plurality of blowing ports are also provided at the lower surface wall of the header 27. Adjacent to the tank 26 in the right side thereof, the exhaust tank 28 is provided facing to the header 27. An aggregate exhaust tank 30 is provided at the lower side of each exhaust tank and it is connected to the tanks 18, 22, 26, 28 through the exhaust pipe 31. The purified air is given to the tank 30 through the air supply pipes 32-35 from the air source and is exhausted to the headers 21, 25, 27.
申请公布号 JPS59208734(A) 申请公布日期 1984.11.27
申请号 JP19830082635 申请日期 1983.05.13
申请人 HITACHI SEISAKUSHO KK 发明人 KABASHIMA AKIRA
分类号 H01L21/52;H01L21/58;(IPC1-7):H01L21/58 主分类号 H01L21/52
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