| 摘要 |
PURPOSE:To improve the adhesive property and wetting property, by sputter etching a molded fluororesin article containing a filler at a high frequency in an argon gas atmosphere. CONSTITUTION:A molded fluororesin article containing preferably 3-25vol% filler, e.g. glass short fibers, is sputter etched at preferably 6X10<-3>-1X10<-7>Torr reaction tank pressure in an atmosphere of ammonia gas, a mixed gas atmosphere of ammonia and argon (preferably <=80% partial pressure ratio) or a mixed gas atmosphere of ammonia, argon and nitrogen at a high frequency. |
