| 摘要 |
PURPOSE:To deposit a metal of high adhesion strength with good controllability of a thickness and pattern by irradiating laser light having a wavelength in a range from visible to IR light at adequate intensity together with UV laser light to a sample base plate which is in contact with the vapor of an org. metal. CONSTITUTION:The visible laser light from a laser oscillator 1 is partly converted to the 2nd higher harmonic wave by the 2nd higher harmonic wave generator 2 and is used as UV laser light. The UV laser light past a visible light reflecting mirror 3 is reflected by reflecting mirrors 4, 4 and the UV laser light and the visible laser light which are made respectively to desired intensities by a variable attenuator 5 are superposed by a multiplexer 6. The superposed laser light is condensed by a lens 7 to a sample base plate 8. An inert gas is passed through a gas feed port 14 and an org. metallic cylinder 15 into a depositing cell 9, so that the vapor of the org. metal is brought into contact with the plate 8. The laser light of the wavelength in the visible to IR range is regulated by the attenuator 5 to the substantial intensity within the range where a significant thermal dissociation does not arise. An optical dissociation is effected by the UV laser light. |
