| 摘要 |
Deposition equipment used to form material for light-guide tubes consists of sealed storerooms (18, 20, 22), which contain liq. raw material; heating devices (24, 26, 28) to heat the storerooms; pumping equipment to supply the reaction vapor; a burner to form the reaction product, a flow control valve (48, 50, 52), a flow velocity converter (66, 68, 70), a controller (60, 62, 64), an operation device for the controller (54, 56, 58), a pouring device for the reaction soot (74, 76, 78, 80, 82), and a system controller (72).
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