| 摘要 |
PURPOSE:To stabilize the parallel degree of a reflecting mirror and to stabilize oscillating power, by keeping the thermal changes of respective linking bodies approximately equal by a heat controlling means, and making it possible to move one of resonators in the longitudinal direction of a gas laser tube with respect to a machine frame. CONSTITUTION:The thermal expansion and the thermal contraction of linking bodies 5, 5 and 6 are kept at the approximately equal value by a heat controlling means. When, the linking bodies 5, 5 and 6 are expanded, a mirror supporting body 2, which is linked by the linking bodies 5, 5 and 6, is displaced in the direction of X1 in parallel with the initial state. At this time, a suspending member 12 is slidden in the direction of X1 with the member 12 being restrained by a guide member 13, depending on the coupling relation between a guide part 131 and a hole. Therefore, the displacement of the reflecting mirror supporting body 2 in the direction of X1 is absorbed. |
