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发明名称
ELECTRON BEAM X-Y COORDINATES POSITION DETERMINING STAGE
摘要
申请公布号
JPS59207625(A)
申请公布日期
1984.11.24
申请号
JP19840086053
申请日期
1984.04.27
申请人
CONTROL DATA CORP
发明人
SEODOAA WAASU TATSUKAA
分类号
H01J37/20;H01J37/305;H01L21/027
主分类号
H01J37/20
代理机构
代理人
主权项
地址
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