| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the measuring accuracy of a cell electrophysiological sensor. <P>SOLUTION: A device for the cell electrophysiological sensor is equipped with a cell-holing chip 11 and a substrate 9 for covering the sides of the cell-holding chip 11 so as to attain the objectives. Furthermore, the cell-holing chip 11 is provided with a conducting hole 14 connecting the upper and the lower surfaces thereof. The cell-holding chip 11 comprises silicon as the principal component. The substrate 9 is formed of glass and a hydrophilic film 16, composed of at least either silicon oxide or silicon nitride, is formed on each side of the cell-holing chip 11. The substrate 9 is heat-fused to the hydrophilic film 16. Thus, gaps between the sides of the cell-holding chip 11 and the substrate 9 can be reduced to raise airtightness and as a result, improve the measurement accuracy of the cell electrophysiological sensor. <P>COPYRIGHT: (C)2009,JPO&INPIT |
