| 摘要 |
PURPOSE:To obtain an actuator which creates large displacement by a method wherein a plurality of flat annular laminated bodies, whose outside circumference walls are covered with conductive thin films respectively, are stuck on an elastic circular base plate concentrically with a certain interval and two terminal pads for voltage application are provided on the surface of the laminated bodies and those pads are selectively connected to the conductive thin films. CONSTITUTION:A circular base plate 12 is made of spring material such as phosphorus bronze which is deformed by bending but actually is not expanded nor contracted. A hole 12A is drilled at the center of the base plate 12 and flat annular blocks 16A, 16B and 16C made of piezoelectric material are stuck on the base plate 12 concentrically around the hole 12A with a predetermined interval to form a flat annular laminated body 14. Conductive thin films 18A and 18B, 18C and 18D and 18E and 18F, which are to serve as electrodes, are applied outside circumference walls of the respective blocks 16A, 16B and 16C composing the laminated body 14. All blocks are covered with an insulation film 20 and two terminal pads 22A and 22B for voltage application are formed on the surface of the laminated body 14 and those pads are connected to the conductive thin films 18B, 18C and 18F and 18A, 18D and 18E respectively. |
