| 摘要 |
PURPOSE:To make the inclination of a sample to coincide with the inclination of a reference datum plane in a short time with high accuracy by the constitution consisting of a mechanism for moving and rotating integrally a sample base and the datum plane and a position sensor detecting the respective reflected light from the sample plane and the reference datum plane. CONSTITUTION:The luminous flux from a laser light source 1 is split by a beam splitter 4. One of the split fluxes is reflected as reference light L1 by a reference datum plane 7 and the other is reflected as measuring light L2 by a sample plane 11a and the interference fringe of both light is projected through a beam splitter 8 on a video camera 13 and is imaged on a position sensor 15 after the light is reflected by the splitter 8. A mirror 26 having a reference plane is attached to the sample base 24 on which the sample 11 is placed. The spot of the light L1 when a shutter 10 is closed and the spot of the light L2 when a shutter 6 is closed are projected on the sensor 15, the positional deviation thereof is adjusted by rotating and moving the base 24 according to said deviation. The inclinations of the plane 7 and the plane 11a are thus made to coincide with each other in a short time with high accuracy. |
