发明名称 REIBUNGSPUMPE
摘要 A friction pump (molecular pump, turbomolecular pump) has pumping surfaces which include surface areas which face upstream as well as surface areas which face downstream with respect to the pumping direction. In at least a portion of the pumping surfaces, surface areas of different roughness are present, such that the roughness of the surface areas facing downstream with respect to the pumping direction is greater than the roughness of the surface areas facing upstream with respect to the pumping direction.
申请公布号 DE3317868(A1) 申请公布日期 1984.11.22
申请号 DE19833317868 申请日期 1983.05.17
申请人 LEYBOLD-HERAEUS GMBH, 5000 KOELN, DE 发明人 REICH, GUENTER, DIPL.-PHYS. DR., 5000 KOELN, DE
分类号 F04D17/16;F04D19/04;(IPC1-7):04D19/04 主分类号 F04D17/16
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