PROCESS AND APPARATUS FOR PRODUCING FINE POWDER

摘要

PURPOSE:To enable effective production of superfine powder by maintaining a reaction chamber in a discharging condition to ionize introduced gas and metal vapor and causing synthetic reaction by irradiating with laser beam. CONSTITUTION:An ionizing coil 2 using high frequency discharge is provided to the outside periphery of a reaction chamber 1. Laser light 3 of CO2 gas, etc. is radiated into the reaction chamber through a window 8. Excessive laser light reaches a window 7 at the opposite side where it is absorbed by a copper plate cooled with water. Introducing holes 4, 5 for reaction gas and an exhausting hole 6 for gaseous product are provided to the reaction chamber and a filter for collecting powder is provided to the midway of an exhausting pipe connected to an exhausting pump.