WIRING STRUCTURE OF ACTIVE MATRIX BOARD

摘要

PURPOSE:To obtain the active-matrix-type liquid crystal display device having a rapid response speed by fabricating a timing signal wire and a terminal electrode with one process with using a low-resistance wiring material for the timing signal wire. CONSTITUTION:A timing signal wire 16 and a terminal electrode 17 are formed out of the material of a single layer or plural layers and at least the uppermost layer is formed simultaneously out of Ni. A film 18 designates an insulating oxide film. As Ni is used for the timing signal wire 16, its line resistance is substantially reduced as compared with case of using polycrystalline Si. By using the active matrix board of this constitution, the liquid crystal display device having a rapid response speed and fine display characteristics is obtained.