| 摘要 |
PURPOSE:To provide a titled machine which decreases machining distortion over a wide area and performs machining at a high speed by the constitution in which the signal for compensating the distortion occuring in the change of the optical path in the X-axis direction to the Y-axis direction of laser beam machining signals is outputted to a laser beam driving part. CONSTITUTION:X-, Y-axis coordinte signals Vx, Vy are outputted from X-, Y- axis coordinate signal generators 61, 62 to a distortion compensating circuit 70 in a working signal generating part 6 which generates a control signal to a laser beam driving part 2 of a laser working device. Vx is made to -Vx by an inversion amplifier 71 and is outputted to a multiplier 73. On the other hand, Vy is made to Vy<2> by a multiplier 72 and is outputted to a multiplier 73, where -Vx. Vy<2> is obtd. Then the value is mutiplied by a constant K by a coefft. device 74 to obtain -KVx.Vy<2> which is outputted to an adder 76. On the other hand, -Vx is inverted by an inversion amplifier 75 and is outputted as Vx to the adder 76, where the input added thereto and the signal V0<x>=Vx-KVx.Vy<2> for compensating the distortion is outputted together with Vy to the X-, Y-axis servocontrol amplifiers 23, 24 respectively of the laser beam driving part 2. |
