| 摘要 |
PURPOSE:To decrease the cost of a charged-particle beam device, reduce a space occupied by an acceleration power supply and reduce the space of the device by using one acceleration power supply for plural electron-beam generators and enabling them to be operated simultaneously or according to the time-division system. CONSTITUTION:The cathode 31 of an electron-beam generator 38 is heated with a cathode-heating power supply 21, and a voltage for accelerating an electron beam 34 is given from an acceleration power supply 7. At the same time, the output voltage of a grid power supply 22 applied across the cathode 31 and a grid 32 is controlled so that the current of the electron beam 34 becomes a given value by detecting the current of the electron beam 34. A plural number of such electron-beam generators 38 and 111 are installed to which acceleration voltages are supplied from the acceleration power supply 7. A cathode-heating power supply 21 and a grid power supply 32 are installed in each of the plural generators 38 and 111. The quantity of the electricity of the electron beam 34 is measured by, for example, a current-measurement resistance 6 placed in a high electric potential area located in a box-like body 36. |
