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发明名称
在基板上形成高深宽比特征之方法
摘要
提供了一种在蚀刻处理中形成高深宽比应用之非等向性特征的方法。在此描述的方法有利地促进具有高深宽比之特征的轮廓和尺寸控制。在一个实施例中,非等向性蚀刻基板上之介电层的方法包括在蚀刻室中提供具有设置于介电层上之图案化遮罩层的基板,供应至少包括含氟和碳气体及氟化矽气体的气体混合物进入蚀刻室中,并在气体混合物形成之电浆存在的情况下蚀刻介电层中之特征。
申请公布号
TW200935519
申请公布日期
2009.08.16
申请号
TW097142044
申请日期
2008.10.31
申请人
应用材料股份有限公司
发明人
肯尼德恩林;凯斯维克凯萨琳;戴希缪克沙珊克;维吉史帝芬;李元锡
分类号
H01L21/311(2006.01)
主分类号
H01L21/311(2006.01)
代理机构
代理人
蔡坤财;李世章
主权项
地址
美国
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