MEMS SWITCH

摘要

An MEMS(Micro Electro Mechanical System) switch is provided to compensate for the deformation of a cantilever unit due to the change of the ambient temperature by forming a compensation layer in a lower part of the cantilever unit. A cantilever unit(110) is supported by a support unit(100). A piezoelectric capacitor(120) is formed in an upper part of a cantilever unit. A contact electrode(130) is formed in the upper part of the cantilever unit. A compensation layer(150) is formed in the lower part of the cantilever unit to compensate for the deformation of the cantilever unit due to the change of the ambient temperature. The compensation layer is made of the material with a thermal expansion coefficient. Signal lines(200) is conducted by the contact of the contact electrode.