发明名称 OPENING AND CLOSING DEVICE OF CHAMBER LID USING GAS SPRING, AND OPENING AND CLOSING METHOD USING THE SAME
摘要 An opening and closing device of a chamber lid using a gas spring, and opening and closing method using the same are provided to prevent an unexpected danger by making the lid from being opened in rapidly. A support block(110) is combined in a chamber body(10). An shaft hole is formed in a support block, and a rotary shaft(120) is combined. A lead connector member(130) connects the lead to the rotary shaft, and the gas spring(140) is installed between a support block and the lead in order to apply a buffer power in opening and closing the lid(20). The gas spring is directly connected to the central part of the lid.
申请公布号 KR20090090018(A) 申请公布日期 2009.08.25
申请号 KR20080015246 申请日期 2008.02.20
申请人 JUSUNG ENGINEERING CO., LTD. 发明人 LEE, JU ILL
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
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