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发明名称
用于基板接合装置之黏着保持装置
摘要
申请公布号
TWD131036
申请公布日期
2009.09.21
申请号
TW097304732
申请日期
2008.08.15
申请人
爱发科股份有限公司 ULVAC, INC. 日本
发明人
小岛孝夫;稻田泰三
分类号
15-99
主分类号
15-99
代理机构
代理人
陈传岳 台北市大安区仁爱路3段136号13楼;郭雨岚 台北市大安区仁爱路3段136号13楼
主权项
地址
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